TY - JOUR
T1 - MEMS Technology at NASA’s Jet Propulsion Laboratory
AU - George, Thomas
AU - Bae, Youngsam
AU - Chakraborty, Indrani
AU - Cherry, Hilary
AU - Evans, Christopher
AU - Eyre, Beverly
AU - Green, Amanda
AU - Hui, Allan
AU - King, Kevin
AU - Kim, Lynn
AU - Lawton, Russell
AU - Lin, Gisela
AU - Marrese, Colleen
AU - Mueller, Juergen
AU - Podosek, Judith
AU - Shcheglov, Kirill
AU - Tang, Tony
AU - VanZandt, Thomas
AU - Vargo, Stephen
AU - Wellman, Joanne
AU - White, Victor
AU - Wiberg, Dean
AU - Yang, Eui Hyeok
PY - 2000/10/26
Y1 - 2000/10/26
N2 - The MEMS Technology Group is part of the Microdevices Laboratory (MDL) at the Jet Propulsion Laboratory (JPL). The group pursues the development of a wide range of advanced MEMS technologies that are primarily applicable to NASA’s robotic as well as manned exploration missions. Thus these technologies are ideally suited for the demanding requirements of space missions namely, low mass, low power consumption and high reliability, without significant loss of capability. End-to-end development of these technologies is conducted at the MDL, a 38,000 sq. ft. facility with approximately 5500 sq. ft each of cleanroom (class 10 - 100,000) and characterization laboratory space. MDL facilities include computer design and simulation tools, optical and electron-beam lithography, thin film deposition equipment, dry and wet etching facilities including Deep Reactive Ion Etching, device assembly and testing facilities. Following the fabrication of the device prototypes, reliability testing of these devices is conducted at the state-of-the-art Failure Analysis Laboratory at JPL. The MEMS Group is also actively pursuing the rapid, low-cost, space-testing of its devices via a proposed DARPA/NASA/Air Force PICOSAT platform. The space-based tests are expected to provide “space-truth” for critical operational parameters of the MEMS devices that can be correlated to the ground-based reliability assurance testing. Some of the key MEMS technologies being developed currently by the group include a vibratory microgyroscope, LIGA-based devices, micro-propulsion devices, micro-valves, adaptive optics, micro-actuators, biomedical devices, system-on-a-chip, micro-instruments and packaging. Future growth areas for the MEMS group are expected to be in the areas of nano-technology and bio-technology.
AB - The MEMS Technology Group is part of the Microdevices Laboratory (MDL) at the Jet Propulsion Laboratory (JPL). The group pursues the development of a wide range of advanced MEMS technologies that are primarily applicable to NASA’s robotic as well as manned exploration missions. Thus these technologies are ideally suited for the demanding requirements of space missions namely, low mass, low power consumption and high reliability, without significant loss of capability. End-to-end development of these technologies is conducted at the MDL, a 38,000 sq. ft. facility with approximately 5500 sq. ft each of cleanroom (class 10 - 100,000) and characterization laboratory space. MDL facilities include computer design and simulation tools, optical and electron-beam lithography, thin film deposition equipment, dry and wet etching facilities including Deep Reactive Ion Etching, device assembly and testing facilities. Following the fabrication of the device prototypes, reliability testing of these devices is conducted at the state-of-the-art Failure Analysis Laboratory at JPL. The MEMS Group is also actively pursuing the rapid, low-cost, space-testing of its devices via a proposed DARPA/NASA/Air Force PICOSAT platform. The space-based tests are expected to provide “space-truth” for critical operational parameters of the MEMS devices that can be correlated to the ground-based reliability assurance testing. Some of the key MEMS technologies being developed currently by the group include a vibratory microgyroscope, LIGA-based devices, micro-propulsion devices, micro-valves, adaptive optics, micro-actuators, biomedical devices, system-on-a-chip, micro-instruments and packaging. Future growth areas for the MEMS group are expected to be in the areas of nano-technology and bio-technology.
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U2 - 10.1117/12.405340
DO - 10.1117/12.405340
M3 - Article
AN - SCOPUS:17744398197
SN - 0277-786X
VL - 4134
SP - 16
EP - 24
JO - Proceedings of SPIE - The International Society for Optical Engineering
JF - Proceedings of SPIE - The International Society for Optical Engineering
IS - 1
ER -