Microactuated self-assembling of 3D polysilicon structures with reshaping technology

Y. Fukuta, D. Collard, T. Akiyama, E. H. Yang, H. Fujita

Research output: Contribution to conferencePaperpeer-review

48 Scopus citations

Abstract

This abstract proposes and experimentally confirms the automatic self-assembling of 3D polysilicon structures, compatible with both mass production and IC based surface machining. This technique combines an integrated actuation based on the Scratch Drive Actuator (SDA), for the structure raising up, and the reshaping technology to obtain the permanent 3D shapes. Complex 3D structures have been successfully realized and their electrostatic actuation have been obtained. This self-building capability of 3D devices from silicon surface micromachining opens new integration capabilities and new application field for MEMS.

Original languageEnglish
Pages477-481
Number of pages5
StatePublished - 1997
EventProceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS - Nagoya, Jpn
Duration: 26 Jan 199730 Jan 1997

Conference

ConferenceProceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS
CityNagoya, Jpn
Period26/01/9730/01/97

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