TY - GEN
T1 - Modeling of surface forces between micron-sized objects in dry condition
AU - Hariri, A.
AU - Zu, J. W.
AU - Mrad, R. Ben
PY - 2004
Y1 - 2004
N2 - Capillary, van der Walls (vdW) and electrostatic forces, which usually termed as surface forces, can significantly affect the behavior and performance of Micro Electro Mechanical Systems (MEMS) containing surfaces that can contact each other. Here, we are concerned with vdW force, which is the dominant surface force between conducting surfaces in the dry condition. In this study, we first review existing roughness models described by stochastic processes of Gaussian and Fractal type. Then, the vdW force is formulated using two methods by considering the first and second order probability density function (pdf) of the height distribution of rough surfaces. The resulting formulae are functions of the correlation (p) between successive sampling points. By analyzing these formulae based on the correlation and other parameters, the upper and lower bound of vdW force are identified and a numerical-based closed-form formula for the upper bound is derived. Finally, various situations are discussed based on the developed equations and data from a surface micro machining process.
AB - Capillary, van der Walls (vdW) and electrostatic forces, which usually termed as surface forces, can significantly affect the behavior and performance of Micro Electro Mechanical Systems (MEMS) containing surfaces that can contact each other. Here, we are concerned with vdW force, which is the dominant surface force between conducting surfaces in the dry condition. In this study, we first review existing roughness models described by stochastic processes of Gaussian and Fractal type. Then, the vdW force is formulated using two methods by considering the first and second order probability density function (pdf) of the height distribution of rough surfaces. The resulting formulae are functions of the correlation (p) between successive sampling points. By analyzing these formulae based on the correlation and other parameters, the upper and lower bound of vdW force are identified and a numerical-based closed-form formula for the upper bound is derived. Finally, various situations are discussed based on the developed equations and data from a surface micro machining process.
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M3 - Conference contribution
AN - SCOPUS:16244412951
SN - 0769521894
T3 - Proceedings - 2004 International Conference on MEMS, NANO and Smart Systems, ICMENS 2004
SP - 623
EP - 628
BT - Proceedings - 2004 International Conference on MEMS, NANO and Smart Systems, ICMENS 2004
A2 - Badawy, W.
A2 - Moussa, W.
T2 - Proceedings - 2004 International Conference on MEMS, NANO and Smart Systems, ICMENS 2004
Y2 - 25 August 2004 through 27 August 2004
ER -