TY - JOUR
T1 - MOEMS spatial light modulator development at the Center for adaptive optics
AU - Krulevitch, Peter
AU - Bierden, Paul
AU - Bifano, Thomas
AU - Carr, Emily
AU - Dimas, Clara
AU - Dyson, Harold
AU - Helmbrecht, Michael
AU - Kurczynski, Peter
AU - Muller, Richard
AU - Olivier, Scot
AU - Peter, Yves Alain
AU - Sadoulet, Bernard
AU - Solgaard, Olav
AU - Yang, E. H.
PY - 2003
Y1 - 2003
N2 - The National Science Foundation Center for Adaptive Optics (CfAO) is coordinating a program for the development of spatial light modulators suitable for adaptive optics applications based on micro-optoelectromechanical systems (MOEMS) technology. This collaborative program is being conducted by researchers at several partner institutions including the Berkeley Sensor & Actuator Center, Boston Micromachines, Boston University, Lucent Technologies, the Jet Propulsion Laboratory, and Lawrence Livermore National Laboratory. The goal of this program is to produce MEMS spatial light modulators with several thousand actuators that can be used for high-resolution wavefront control applications that would benefit from low device cost, small system size, and low power requirements. The two primary applications targeted by the CfAO are astronomy and vision science. In this paper, we present an overview of the CfAO MEMS development plan along with details of the current program status.
AB - The National Science Foundation Center for Adaptive Optics (CfAO) is coordinating a program for the development of spatial light modulators suitable for adaptive optics applications based on micro-optoelectromechanical systems (MOEMS) technology. This collaborative program is being conducted by researchers at several partner institutions including the Berkeley Sensor & Actuator Center, Boston Micromachines, Boston University, Lucent Technologies, the Jet Propulsion Laboratory, and Lawrence Livermore National Laboratory. The goal of this program is to produce MEMS spatial light modulators with several thousand actuators that can be used for high-resolution wavefront control applications that would benefit from low device cost, small system size, and low power requirements. The two primary applications targeted by the CfAO are astronomy and vision science. In this paper, we present an overview of the CfAO MEMS development plan along with details of the current program status.
KW - Adaptive optics
KW - Astronomy
KW - Center for Adaptive Optics
KW - Spatial light modulator
KW - Vision science
UR - http://www.scopus.com/inward/record.url?scp=0038395952&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0038395952&partnerID=8YFLogxK
U2 - 10.1117/12.478562
DO - 10.1117/12.478562
M3 - Conference article
AN - SCOPUS:0038395952
SN - 0277-786X
VL - 4985
SP - 172
EP - 179
JO - Proceedings of SPIE - The International Society for Optical Engineering
JF - Proceedings of SPIE - The International Society for Optical Engineering
T2 - MOEMS Display and Imaging Systems
Y2 - 28 January 2003 through 29 January 2003
ER -