MOEMS spatial light modulator development at the center for adaptive optics

Peter Krulevitch; Paul Bierden; Thomas Bifano; Emily Carr; Clara Dimas; Harold Dyson; Michael Hehnbrecht; Peter Kurczynski; Richard Muller; Scot Olivier; Yves Alain Peter; Bernard Sadoulet; Olav Solgaard; E. H. Yang

MOEMS spatial light modulator development at the center for adaptive optics

Peter Krulevitch
, Paul Bierden
, Thomas Bifano
, Emily Carr
, Clara Dimas
, Harold Dyson
, Michael Hehnbrecht
, Peter Kurczynski
, Richard Muller
, Scot Olivier
, Yves Alain Peter
, Bernard Sadoulet
, Olav Solgaard
, E. H. Yang

Department of Mechanical Engineering

Research output: Contribution to journal › Conference article › peer-review

17 Scopus citations

Abstract

The National Science Foundation Center for Adaptive Optics (CfAO) is coordinating a program for the development of spatial light modulators suitable for adaptive optics applications based on micro-optoelectromechanical systems (MOEMS) technology. This collaborative program is being conducted by researchers at several partner institutions including the Berkeley Sensor & Actuator Center, Boston Micromachines, Boston University, Lucent Technologies, the Jet Propulsion Laboratory, and Lawrence Livermore National Laboratory. The goal of this program is to produce MEMS spatial light modulators with several thousand actuators that can be used for high-resolution wavefront control applications that would benefit from low device cost, small system size, and low power requirements. The two primary applications targeted by the CfAO are astronomy and vision science. In this paper, we present an overview of the CfAO MEMS development plan along with details of the current program status.

Original language	English
Pages (from-to)	227-234
Number of pages	8
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4983
State	Published - 2003
Event	MOEMS and Miniaturized Systems III - San Jose, CA, United States Duration: 27 Jan 2003 → 29 Jan 2003

Keywords

Adaptive optics
Astronomy
Center for Adaptive Optics
Spatial light modulator
Vision science

Cite this

@article{7e32d808bfc24b6f8144355610d441ce,

title = "MOEMS spatial light modulator development at the center for adaptive optics",

abstract = "The National Science Foundation Center for Adaptive Optics (CfAO) is coordinating a program for the development of spatial light modulators suitable for adaptive optics applications based on micro-optoelectromechanical systems (MOEMS) technology. This collaborative program is being conducted by researchers at several partner institutions including the Berkeley Sensor \& Actuator Center, Boston Micromachines, Boston University, Lucent Technologies, the Jet Propulsion Laboratory, and Lawrence Livermore National Laboratory. The goal of this program is to produce MEMS spatial light modulators with several thousand actuators that can be used for high-resolution wavefront control applications that would benefit from low device cost, small system size, and low power requirements. The two primary applications targeted by the CfAO are astronomy and vision science. In this paper, we present an overview of the CfAO MEMS development plan along with details of the current program status.",

keywords = "Adaptive optics, Astronomy, Center for Adaptive Optics, Spatial light modulator, Vision science",

author = "Peter Krulevitch and Paul Bierden and Thomas Bifano and Emily Carr and Clara Dimas and Harold Dyson and Michael Hehnbrecht and Peter Kurczynski and Richard Muller and Scot Olivier and Peter, \{Yves Alain\} and Bernard Sadoulet and Olav Solgaard and Yang, \{E. H.\}",

year = "2003",

language = "English",

volume = "4983",

pages = "227--234",

note = "MOEMS and Miniaturized Systems III ; Conference date: 27-01-2003 Through 29-01-2003",

}

TY - JOUR

T1 - MOEMS spatial light modulator development at the center for adaptive optics

AU - Krulevitch, Peter

AU - Bierden, Paul

AU - Bifano, Thomas

AU - Carr, Emily

AU - Dimas, Clara

AU - Dyson, Harold

AU - Hehnbrecht, Michael

AU - Kurczynski, Peter

AU - Muller, Richard

AU - Olivier, Scot

AU - Peter, Yves Alain

AU - Sadoulet, Bernard

AU - Solgaard, Olav

AU - Yang, E. H.

PY - 2003

Y1 - 2003

N2 - The National Science Foundation Center for Adaptive Optics (CfAO) is coordinating a program for the development of spatial light modulators suitable for adaptive optics applications based on micro-optoelectromechanical systems (MOEMS) technology. This collaborative program is being conducted by researchers at several partner institutions including the Berkeley Sensor & Actuator Center, Boston Micromachines, Boston University, Lucent Technologies, the Jet Propulsion Laboratory, and Lawrence Livermore National Laboratory. The goal of this program is to produce MEMS spatial light modulators with several thousand actuators that can be used for high-resolution wavefront control applications that would benefit from low device cost, small system size, and low power requirements. The two primary applications targeted by the CfAO are astronomy and vision science. In this paper, we present an overview of the CfAO MEMS development plan along with details of the current program status.

AB - The National Science Foundation Center for Adaptive Optics (CfAO) is coordinating a program for the development of spatial light modulators suitable for adaptive optics applications based on micro-optoelectromechanical systems (MOEMS) technology. This collaborative program is being conducted by researchers at several partner institutions including the Berkeley Sensor & Actuator Center, Boston Micromachines, Boston University, Lucent Technologies, the Jet Propulsion Laboratory, and Lawrence Livermore National Laboratory. The goal of this program is to produce MEMS spatial light modulators with several thousand actuators that can be used for high-resolution wavefront control applications that would benefit from low device cost, small system size, and low power requirements. The two primary applications targeted by the CfAO are astronomy and vision science. In this paper, we present an overview of the CfAO MEMS development plan along with details of the current program status.

KW - Adaptive optics

KW - Astronomy

KW - Center for Adaptive Optics

KW - Spatial light modulator

KW - Vision science

UR - https://www.scopus.com/pages/publications/0037720343

UR - https://www.scopus.com/pages/publications/0037720343#tab=citedBy

M3 - Conference article

AN - SCOPUS:0037720343

SN - 0277-786X

VL - 4983

SP - 227

EP - 234

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - MOEMS and Miniaturized Systems III

Y2 - 27 January 2003 through 29 January 2003

ER -

MOEMS spatial light modulator development at the center for adaptive optics

Abstract

Keywords

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