Novel wet transfer technology of manufacturing flexible suspended two-dimensional material devices

Yingtao Wang, Mona Savalia, Xian Zhang

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

With the rise of two-dimensional (2D) materials, their excellent optical, electronic, and thermal properties different from bulk materials make them increasingly widely studied and commercialized. 2D materials’ exceptional physical properties and unique structures make them an ideal candidate for next-generation flexible and wearable devices. In this work, we created a manufacturing method to successfully transfer monolayer, bilayer, and trilayer graphene onto the flexible substrate, with trenches of micron size to suspend graphene. Thermal transport measurements have been characterized to prove the suspended region. The achievement of manufacturing 2D materials in suspended condition will allow us to study their intrinsic physical properties at a mechanical strain, as well as contribute to novel flexible and wearable electronic devices and sensors.

Original languageEnglish
Article number062810
JournalJournal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Volume41
Issue number6
DOIs
StatePublished - 1 Dec 2023

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