TY - JOUR
T1 - Novel wet transfer technology of manufacturing flexible suspended two-dimensional material devices
AU - Wang, Yingtao
AU - Savalia, Mona
AU - Zhang, Xian
N1 - Publisher Copyright:
© 2023 Author(s).
PY - 2023/12/1
Y1 - 2023/12/1
N2 - With the rise of two-dimensional (2D) materials, their excellent optical, electronic, and thermal properties different from bulk materials make them increasingly widely studied and commercialized. 2D materials’ exceptional physical properties and unique structures make them an ideal candidate for next-generation flexible and wearable devices. In this work, we created a manufacturing method to successfully transfer monolayer, bilayer, and trilayer graphene onto the flexible substrate, with trenches of micron size to suspend graphene. Thermal transport measurements have been characterized to prove the suspended region. The achievement of manufacturing 2D materials in suspended condition will allow us to study their intrinsic physical properties at a mechanical strain, as well as contribute to novel flexible and wearable electronic devices and sensors.
AB - With the rise of two-dimensional (2D) materials, their excellent optical, electronic, and thermal properties different from bulk materials make them increasingly widely studied and commercialized. 2D materials’ exceptional physical properties and unique structures make them an ideal candidate for next-generation flexible and wearable devices. In this work, we created a manufacturing method to successfully transfer monolayer, bilayer, and trilayer graphene onto the flexible substrate, with trenches of micron size to suspend graphene. Thermal transport measurements have been characterized to prove the suspended region. The achievement of manufacturing 2D materials in suspended condition will allow us to study their intrinsic physical properties at a mechanical strain, as well as contribute to novel flexible and wearable electronic devices and sensors.
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U2 - 10.1116/6.0003087
DO - 10.1116/6.0003087
M3 - Article
AN - SCOPUS:85179558024
SN - 2166-2746
VL - 41
JO - Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
JF - Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
IS - 6
M1 - 062810
ER -