TY - JOUR
T1 - Optimized design, fabrication and characterization of PZT unimorph microactuators for deformable mirrors
AU - Hishinuma, Yoshikazu
AU - Yang, Eui Hyeok
AU - Cheng, Jian Gong
AU - Trolier-McKinstry, Susan
PY - 2004
Y1 - 2004
N2 - This paper describes an optimization of PZT unimorph membrane microactuators in view of their application to deformable mirrors (DMs). PZT unimorph actuators of various electrode designs, silicon membrane thickness, and membrane sizes were fabricated and characterized. A mathematical model was developed to further assist the optimization of membrane thickness and electrode sizes, and excellent agreement with experiment was obtained. For a 2.5mm diameter actuator with 2μm thick PZT and 15μm thick silicon membrane, the measured vertical stroke was 5.4μm at 50V. The measured resonant frequency of the unimorph actuator was 47kHz, far exceeding the bandwidth requirement of most DMs (∼1kHz).
AB - This paper describes an optimization of PZT unimorph membrane microactuators in view of their application to deformable mirrors (DMs). PZT unimorph actuators of various electrode designs, silicon membrane thickness, and membrane sizes were fabricated and characterized. A mathematical model was developed to further assist the optimization of membrane thickness and electrode sizes, and excellent agreement with experiment was obtained. For a 2.5mm diameter actuator with 2μm thick PZT and 15μm thick silicon membrane, the measured vertical stroke was 5.4μm at 50V. The measured resonant frequency of the unimorph actuator was 47kHz, far exceeding the bandwidth requirement of most DMs (∼1kHz).
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U2 - 10.1115/IMECE2004-62070
DO - 10.1115/IMECE2004-62070
M3 - Conference article
AN - SCOPUS:21644448142
SN - 1096-665X
SP - 299
EP - 304
JO - American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
JF - American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
M1 - IMECE2004-62070
T2 - 2004 ASME International Mechanical Engineering Congress and Exposition, IMECE
Y2 - 13 November 2004 through 19 November 2004
ER -