Oxidation Studies of Crystalline CVD Silicon Nitride

Honghua Du, Richard E. Tressler, Karl E. Spear, Carlo G. Pantano

Research output: Contribution to journal › Article › peer-review

202 Scopus citations

Fingerprint

Dive into the research topics of 'Oxidation Studies of Crystalline CVD Silicon Nitride'. Together they form a unique fingerprint.

Material Science

Chemistry

Engineering

Biochemistry, Genetics and Molecular Biology