Piezoelectric unimorph MEMS deformable mirror for ultra-large telescopes

Yoshikazu Hishinuma, Eui Hyeok Yang, B. Martin Levine, Eric Bloemhof

Research output: Contribution to journalConference articlepeer-review

4 Scopus citations

Abstract

This paper describes the results of our demonstration on a proof-of-concept piezoelectric unimorph-based deformable mirror (DM) with continuous single-crystal silicon membrane. A PZT unimorph actuator of 2.5 mm in diameter with optimized PZT/Si thickness and design showed a deflection of 5 μm at 50 V. DMs consisting of 10 μm thick single-crystal silicon membranes supported by 4×4 actuator arrays were fabricated and optically characterized. An assembled DM showed a stroke of 2.5 μm at 50 V with a resonant frequency of 42 kHz and influence function of approximately 25%.

Original languageEnglish
Article number03
Pages (from-to)21-29
Number of pages9
JournalProgress in Biomedical Optics and Imaging - Proceedings of SPIE
Volume5717
DOIs
StatePublished - 2005
EventMEMS/MOEMS Components and Their Applications II - San Jose, CA, United States
Duration: 24 Jan 200525 Jan 2005

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