TY - JOUR
T1 - Piezoelectric unimorph MEMS deformable mirror for ultra-large telescopes
AU - Hishinuma, Yoshikazu
AU - Yang, Eui Hyeok
AU - Levine, B. Martin
AU - Bloemhof, Eric
PY - 2005
Y1 - 2005
N2 - This paper describes the results of our demonstration on a proof-of-concept piezoelectric unimorph-based deformable mirror (DM) with continuous single-crystal silicon membrane. A PZT unimorph actuator of 2.5 mm in diameter with optimized PZT/Si thickness and design showed a deflection of 5 μm at 50 V. DMs consisting of 10 μm thick single-crystal silicon membranes supported by 4×4 actuator arrays were fabricated and optically characterized. An assembled DM showed a stroke of 2.5 μm at 50 V with a resonant frequency of 42 kHz and influence function of approximately 25%.
AB - This paper describes the results of our demonstration on a proof-of-concept piezoelectric unimorph-based deformable mirror (DM) with continuous single-crystal silicon membrane. A PZT unimorph actuator of 2.5 mm in diameter with optimized PZT/Si thickness and design showed a deflection of 5 μm at 50 V. DMs consisting of 10 μm thick single-crystal silicon membranes supported by 4×4 actuator arrays were fabricated and optically characterized. An assembled DM showed a stroke of 2.5 μm at 50 V with a resonant frequency of 42 kHz and influence function of approximately 25%.
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U2 - 10.1117/12.591275
DO - 10.1117/12.591275
M3 - Conference article
AN - SCOPUS:21844451630
SN - 1605-7422
VL - 5717
SP - 21
EP - 29
JO - Progress in Biomedical Optics and Imaging - Proceedings of SPIE
JF - Progress in Biomedical Optics and Imaging - Proceedings of SPIE
M1 - 03
T2 - MEMS/MOEMS Components and Their Applications II
Y2 - 24 January 2005 through 25 January 2005
ER -