Piezoelectric unimorph MEMS deformable mirror for ultra-large telescopes

Yoshikazu Hishinuma; Eui Hyeok Yang; B. Martin Levine; Eric Bloemhof

doi:10.1117/12.591275

Piezoelectric unimorph MEMS deformable mirror for ultra-large telescopes

Yoshikazu Hishinuma
, Eui Hyeok Yang
, B. Martin Levine
, Eric Bloemhof

Department of Mechanical Engineering

Jet Propulsion Laboratory, California Institute of Technology

Research output: Contribution to journal › Conference article › peer-review

4 Scopus citations

Abstract

This paper describes the results of our demonstration on a proof-of-concept piezoelectric unimorph-based deformable mirror (DM) with continuous single-crystal silicon membrane. A PZT unimorph actuator of 2.5 mm in diameter with optimized PZT/Si thickness and design showed a deflection of 5 μm at 50 V. DMs consisting of 10 μm thick single-crystal silicon membranes supported by 4×4 actuator arrays were fabricated and optically characterized. An assembled DM showed a stroke of 2.5 μm at 50 V with a resonant frequency of 42 kHz and influence function of approximately 25%.

Original language	English
Article number	03
Pages (from-to)	21-29
Number of pages	9
Journal	Progress in Biomedical Optics and Imaging - Proceedings of SPIE
Volume	5717
DOIs	https://doi.org/10.1117/12.591275
State	Published - 2005
Event	MEMS/MOEMS Components and Their Applications II - San Jose, CA, United States Duration: 24 Jan 2005 → 25 Jan 2005

Access to Document

10.1117/12.591275

Cite this

@article{52929ec43d2d4d828defadd76bf885d6,

title = "Piezoelectric unimorph MEMS deformable mirror for ultra-large telescopes",

abstract = "This paper describes the results of our demonstration on a proof-of-concept piezoelectric unimorph-based deformable mirror (DM) with continuous single-crystal silicon membrane. A PZT unimorph actuator of 2.5 mm in diameter with optimized PZT/Si thickness and design showed a deflection of 5 μm at 50 V. DMs consisting of 10 μm thick single-crystal silicon membranes supported by 4×4 actuator arrays were fabricated and optically characterized. An assembled DM showed a stroke of 2.5 μm at 50 V with a resonant frequency of 42 kHz and influence function of approximately 25\%.",

author = "Yoshikazu Hishinuma and Yang, \{Eui Hyeok\} and Levine, \{B. Martin\} and Eric Bloemhof",

year = "2005",

doi = "10.1117/12.591275",

language = "English",

volume = "5717",

pages = "21--29",

note = "MEMS/MOEMS Components and Their Applications II ; Conference date: 24-01-2005 Through 25-01-2005",

}

TY - JOUR

T1 - Piezoelectric unimorph MEMS deformable mirror for ultra-large telescopes

AU - Hishinuma, Yoshikazu

AU - Yang, Eui Hyeok

AU - Levine, B. Martin

AU - Bloemhof, Eric

PY - 2005

Y1 - 2005

N2 - This paper describes the results of our demonstration on a proof-of-concept piezoelectric unimorph-based deformable mirror (DM) with continuous single-crystal silicon membrane. A PZT unimorph actuator of 2.5 mm in diameter with optimized PZT/Si thickness and design showed a deflection of 5 μm at 50 V. DMs consisting of 10 μm thick single-crystal silicon membranes supported by 4×4 actuator arrays were fabricated and optically characterized. An assembled DM showed a stroke of 2.5 μm at 50 V with a resonant frequency of 42 kHz and influence function of approximately 25%.

AB - This paper describes the results of our demonstration on a proof-of-concept piezoelectric unimorph-based deformable mirror (DM) with continuous single-crystal silicon membrane. A PZT unimorph actuator of 2.5 mm in diameter with optimized PZT/Si thickness and design showed a deflection of 5 μm at 50 V. DMs consisting of 10 μm thick single-crystal silicon membranes supported by 4×4 actuator arrays were fabricated and optically characterized. An assembled DM showed a stroke of 2.5 μm at 50 V with a resonant frequency of 42 kHz and influence function of approximately 25%.

UR - https://www.scopus.com/pages/publications/21844451630

UR - https://www.scopus.com/pages/publications/21844451630#tab=citedBy

U2 - 10.1117/12.591275

DO - 10.1117/12.591275

M3 - Conference article

AN - SCOPUS:21844451630

SN - 1605-7422

VL - 5717

SP - 21

EP - 29

JO - Progress in Biomedical Optics and Imaging - Proceedings of SPIE

JF - Progress in Biomedical Optics and Imaging - Proceedings of SPIE

M1 - 03

T2 - MEMS/MOEMS Components and Their Applications II

Y2 - 24 January 2005 through 25 January 2005

ER -

Piezoelectric unimorph MEMS deformable mirror for ultra-large telescopes

Abstract

Access to Document

Other files and links

Fingerprint

Cite this