Piezoelectrically actuated microvalves for micropropulsion applications

Eui Hyeok Yang, Choonsup Lee

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

This paper presents a piezoelectric microvalve technology with a high pressure handling capability for micropropulsion applications. The device is a normally closed valve fabricated mostly by the micromachining of silicon. The valve consists of a custom designed piezoelectric stack actuator bonded onto silicon valve components in a stainless steel housing. Major elements of the silicon valve design include narrow edge seating rings and tensile-stressed silicon tethers that contribute to the desired normally closed leak-tight operation. No leak has been detected from a soap solution test at differential pressures of 0∼500 psi for a normally closed valve structure, indicating a leak rate of 0.001sccm or lower has been achieved. Piezoelectric operation has been successfully demonstrated at a differential pressure of 500 psi. A flow rate of 20 sccm at 100 psi has been obtained at 50 V.

Original languageEnglish
Title of host publicationMicroelectromechanical Systems
Pages449-453
Number of pages5
DOIs
StatePublished - 2002

Publication series

NameASME International Mechanical Engineering Congress and Exposition, Proceedings

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