Real-time in situ detection of SF6 in a plasma reactor

H. C. Sun, E. A. Whittaker

Research output: Contribution to journalArticlepeer-review

7 Scopus citations

Abstract

We report on the real-time in situ detection of SF6 in a plasma etching reactor with μTorr sensitivity using a tunable diode laser absorption spectrometer. The spectrometer employs combined wavelength and frequency modulation of the laser diode, an approach which allows for sensitive, interference fringe-free detection of the SF6. The dual modulation scheme also provides a feedback signal which enables the laser to be frequency locked to the absorption line.

Original languageEnglish
Pages (from-to)1035-1037
Number of pages3
JournalApplied Physics Letters
Volume63
Issue number8
DOIs
StatePublished - 1993

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