TY - GEN
T1 - Reliability-based MEMS system modeling and optimization
AU - Nan, Liu
AU - Manoochehri, Souran
PY - 2006
Y1 - 2006
N2 - A methodology for reliability-based system modeling, analysis and optimization design of micro-electromechanical systems (MEMS) is presented that accounts for stochastic variations in device geometry parameters and operating conditions. The optimization objective function considers minimization of several uncertainty factors related to the overall system performance while satisfying target requirements specified. A probabilistic sufficiency factor approach is proposed in the form of constraints on micro-fabrication processes and materials system that combine safety factor and probability of failure. The design problem is decomposed into two analysis systems; uncertainty effects analysis and performance sensitivity analysis. Each analysis system can be partitioned into several subsystems according to the different functions they perform. The entire problem has been treated as a multi-disciplinary design optimization (MDO) for maximum robustness and performance achievement. The probabilistic sufficiency factor approach represents a factor of safety relative to a target probability of failure. It is known that the use of probabilistic sufficiency factor as a design constraint boundary is much more accurate and reasonable, and this accelerates the convergence of reliability-based design optimization. In this study, the analysis results are provided as optimized device geometry parameters governing the resonant frequency and the trans-conductance values for the example of a selected micro-resonator device.
AB - A methodology for reliability-based system modeling, analysis and optimization design of micro-electromechanical systems (MEMS) is presented that accounts for stochastic variations in device geometry parameters and operating conditions. The optimization objective function considers minimization of several uncertainty factors related to the overall system performance while satisfying target requirements specified. A probabilistic sufficiency factor approach is proposed in the form of constraints on micro-fabrication processes and materials system that combine safety factor and probability of failure. The design problem is decomposed into two analysis systems; uncertainty effects analysis and performance sensitivity analysis. Each analysis system can be partitioned into several subsystems according to the different functions they perform. The entire problem has been treated as a multi-disciplinary design optimization (MDO) for maximum robustness and performance achievement. The probabilistic sufficiency factor approach represents a factor of safety relative to a target probability of failure. It is known that the use of probabilistic sufficiency factor as a design constraint boundary is much more accurate and reasonable, and this accelerates the convergence of reliability-based design optimization. In this study, the analysis results are provided as optimized device geometry parameters governing the resonant frequency and the trans-conductance values for the example of a selected micro-resonator device.
KW - MEMS design
KW - Optimization
KW - Reliability
UR - http://www.scopus.com/inward/record.url?scp=34250764802&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=34250764802&partnerID=8YFLogxK
U2 - 10.1109/RELPHY.2006.251252
DO - 10.1109/RELPHY.2006.251252
M3 - Conference contribution
AN - SCOPUS:34250764802
SN - 0780394992
SN - 0780394984
SN - 9780780394988
T3 - IEEE International Reliability Physics Symposium Proceedings
SP - 403
EP - 409
BT - 2006 IEEE International Reliability Physics Symposium Proceedings, 44th Annual
T2 - 44th Annual IEEE International Reliability Physics Symposium, IRPS 2006
Y2 - 26 March 2006 through 30 March 2006
ER -