TY - JOUR
T1 - Reshaping of single-crystal silicon microstructures
AU - Yang, Eui Hyeok
AU - Fujita, Hiroyuki
PY - 1999
Y1 - 1999
N2 - This paper deals with the reshaping technology for realizing three-dimensional (3-D) microstructures through plastic deformation of single-crystal silicon (SCS) films by applying Joule heating. SCS beams are used for determining the behavior of SCS microstructures during reshaping. The reshaped SCS structure has a sharp corner at a point where stress and heat are concentrated. The plastic deformation caused by flow stress results in permanent 3-D shapes.
AB - This paper deals with the reshaping technology for realizing three-dimensional (3-D) microstructures through plastic deformation of single-crystal silicon (SCS) films by applying Joule heating. SCS beams are used for determining the behavior of SCS microstructures during reshaping. The reshaped SCS structure has a sharp corner at a point where stress and heat are concentrated. The plastic deformation caused by flow stress results in permanent 3-D shapes.
KW - 3-D structures
KW - Dislocation motion
KW - Reshaping technology
KW - SDA
KW - Self-assembling
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U2 - 10.1143/jjap.38.1580
DO - 10.1143/jjap.38.1580
M3 - Article
AN - SCOPUS:0032651553
SN - 0021-4922
VL - 38
SP - 1580
EP - 1583
JO - Japanese Journal of Applied Physics, Part 2: Letters
JF - Japanese Journal of Applied Physics, Part 2: Letters
IS - 3 A
ER -