Reshaping of single-crystal silicon microstructures

Eui Hyeok Yang, Hiroyuki Fujita

Research output: Contribution to journalArticlepeer-review

11 Scopus citations

Abstract

This paper deals with the reshaping technology for realizing three-dimensional (3-D) microstructures through plastic deformation of single-crystal silicon (SCS) films by applying Joule heating. SCS beams are used for determining the behavior of SCS microstructures during reshaping. The reshaped SCS structure has a sharp corner at a point where stress and heat are concentrated. The plastic deformation caused by flow stress results in permanent 3-D shapes.

Original languageEnglish
Pages (from-to)1580-1583
Number of pages4
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume38
Issue number3 A
DOIs
StatePublished - 1999

Keywords

  • 3-D structures
  • Dislocation motion
  • Reshaping technology
  • SDA
  • Self-assembling

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