Reshaping of single-crystal silicon microstructures

Eui Hyeok Yang; Hiroyuki Fujita

doi:10.1143/jjap.38.1580

Reshaping of single-crystal silicon microstructures

Eui Hyeok Yang
, Hiroyuki Fujita

Department of Mechanical Engineering

The University of Tokyo

Research output: Contribution to journal › Article › peer-review

11 Scopus citations

Abstract

This paper deals with the reshaping technology for realizing three-dimensional (3-D) microstructures through plastic deformation of single-crystal silicon (SCS) films by applying Joule heating. SCS beams are used for determining the behavior of SCS microstructures during reshaping. The reshaped SCS structure has a sharp corner at a point where stress and heat are concentrated. The plastic deformation caused by flow stress results in permanent 3-D shapes.

Original language	English
Pages (from-to)	1580-1583
Number of pages	4
Journal	Japanese Journal of Applied Physics, Part 2: Letters
Volume	38
Issue number	3 A
DOIs	https://doi.org/10.1143/jjap.38.1580
State	Published - 1999

Keywords

3-D structures
Dislocation motion
Reshaping technology
SDA
Self-assembling

Access to Document

10.1143/jjap.38.1580

Cite this

@article{134e1097b02d46acb074476e93026d0b,

title = "Reshaping of single-crystal silicon microstructures",

abstract = "This paper deals with the reshaping technology for realizing three-dimensional (3-D) microstructures through plastic deformation of single-crystal silicon (SCS) films by applying Joule heating. SCS beams are used for determining the behavior of SCS microstructures during reshaping. The reshaped SCS structure has a sharp corner at a point where stress and heat are concentrated. The plastic deformation caused by flow stress results in permanent 3-D shapes.",

keywords = "3-D structures, Dislocation motion, Reshaping technology, SDA, Self-assembling",

author = "Yang, \{Eui Hyeok\} and Hiroyuki Fujita",

year = "1999",

doi = "10.1143/jjap.38.1580",

language = "English",

volume = "38",

pages = "1580--1583",

number = "3 A",

}

TY - JOUR

T1 - Reshaping of single-crystal silicon microstructures

AU - Yang, Eui Hyeok

AU - Fujita, Hiroyuki

PY - 1999

Y1 - 1999

N2 - This paper deals with the reshaping technology for realizing three-dimensional (3-D) microstructures through plastic deformation of single-crystal silicon (SCS) films by applying Joule heating. SCS beams are used for determining the behavior of SCS microstructures during reshaping. The reshaped SCS structure has a sharp corner at a point where stress and heat are concentrated. The plastic deformation caused by flow stress results in permanent 3-D shapes.

AB - This paper deals with the reshaping technology for realizing three-dimensional (3-D) microstructures through plastic deformation of single-crystal silicon (SCS) films by applying Joule heating. SCS beams are used for determining the behavior of SCS microstructures during reshaping. The reshaped SCS structure has a sharp corner at a point where stress and heat are concentrated. The plastic deformation caused by flow stress results in permanent 3-D shapes.

KW - 3-D structures

KW - Dislocation motion

KW - Reshaping technology

KW - SDA

KW - Self-assembling

UR - https://www.scopus.com/pages/publications/0032651553

UR - https://www.scopus.com/pages/publications/0032651553#tab=citedBy

U2 - 10.1143/jjap.38.1580

DO - 10.1143/jjap.38.1580

M3 - Article

AN - SCOPUS:0032651553

SN - 0021-4922

VL - 38

SP - 1580

EP - 1583

JO - Japanese Journal of Applied Physics, Part 2: Letters

JF - Japanese Journal of Applied Physics, Part 2: Letters

IS - 3 A

ER -

Reshaping of single-crystal silicon microstructures

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this