TY - JOUR
T1 - Self-lubricating, TiN-MoS2 composite coatings produced by simultaneous deposition from Ti((CH3)2N)4/NH3/MoF6/H2S gas mixtures
AU - Bae, Y. W.
AU - Lee, W. Y.
AU - Besmann, T. M.
AU - Blau, P. J.
AU - More, K. L.
AU - Braski, D. N.
PY - 1995
Y1 - 1995
N2 - Composite coatings consisting of discrete phases of TiN and MoS2 were codeposited on graphite substrates from Ti((CH3)2N)4/NH3/MoF6/H2S gas mixtures in a cold-wall reactor at 1073 K and 1.3 kPa. Chemical composition and microstructure of the coatings were characterized by Auger electron spectroscopy, X-ray diffraction, and transmission electron microscopy. Kinetic friction coefficients of the coatings were determined by a computer-controlled friction microprobe and values less than 0.2 were obtained with a type-440C stainless-steel counterface under ambient condition.
AB - Composite coatings consisting of discrete phases of TiN and MoS2 were codeposited on graphite substrates from Ti((CH3)2N)4/NH3/MoF6/H2S gas mixtures in a cold-wall reactor at 1073 K and 1.3 kPa. Chemical composition and microstructure of the coatings were characterized by Auger electron spectroscopy, X-ray diffraction, and transmission electron microscopy. Kinetic friction coefficients of the coatings were determined by a computer-controlled friction microprobe and values less than 0.2 were obtained with a type-440C stainless-steel counterface under ambient condition.
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M3 - Conference article
AN - SCOPUS:0029225841
SN - 0272-9172
VL - 363
SP - 231
EP - 236
JO - Materials Research Society Symposium Proceedings
JF - Materials Research Society Symposium Proceedings
T2 - Proceedings of the 1994 MRS Fall Meeting
Y2 - 28 November 1994 through 30 November 1994
ER -