Self-lubricating, TiN-MoS2 composite coatings produced by simultaneous deposition from Ti((CH3)2N)4/NH3/MoF6/H2S gas mixtures

Y. W. Bae, W. Y. Lee, T. M. Besmann, P. J. Blau, K. L. More, D. N. Braski

Research output: Contribution to journalConference articlepeer-review

Abstract

Composite coatings consisting of discrete phases of TiN and MoS2 were codeposited on graphite substrates from Ti((CH3)2N)4/NH3/MoF6/H2S gas mixtures in a cold-wall reactor at 1073 K and 1.3 kPa. Chemical composition and microstructure of the coatings were characterized by Auger electron spectroscopy, X-ray diffraction, and transmission electron microscopy. Kinetic friction coefficients of the coatings were determined by a computer-controlled friction microprobe and values less than 0.2 were obtained with a type-440C stainless-steel counterface under ambient condition.

Original languageEnglish
Pages (from-to)231-236
Number of pages6
JournalMaterials Research Society Symposium Proceedings
Volume363
StatePublished - 1995
EventProceedings of the 1994 MRS Fall Meeting - Boston, MA, USA
Duration: 28 Nov 199430 Nov 1994

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