Self-lubricating, TiN-MoS2 composite coatings produced by simultaneous deposition from Ti((CH3)2N)4/NH3/MoF6/H2S gas mixtures

Y. W. Bae; W. Y. Lee; T. M. Besmann; P. J. Blau; K. L. More; D. N. Braski

Self-lubricating, TiN-MoS₂ composite coatings produced by simultaneous deposition from Ti((CH₃)₂N)₄/NH₃/MoF₆/H₂S gas mixtures

Y. W. Bae
, W. Y. Lee
, T. M. Besmann
, P. J. Blau
, K. L. More
, D. N. Braski

Oak Ridge National Laboratory

Research output: Contribution to journal › Conference article › peer-review

Abstract

Composite coatings consisting of discrete phases of TiN and MoS₂ were codeposited on graphite substrates from Ti((CH₃)₂N)₄/NH₃/MoF₆/H₂S gas mixtures in a cold-wall reactor at 1073 K and 1.3 kPa. Chemical composition and microstructure of the coatings were characterized by Auger electron spectroscopy, X-ray diffraction, and transmission electron microscopy. Kinetic friction coefficients of the coatings were determined by a computer-controlled friction microprobe and values less than 0.2 were obtained with a type-440C stainless-steel counterface under ambient condition.

Original language	English
Pages (from-to)	231-236
Number of pages	6
Journal	Materials Research Society Symposium Proceedings
Volume	363
State	Published - 1995
Event	Proceedings of the 1994 MRS Fall Meeting - Boston, MA, USA Duration: 28 Nov 1994 → 30 Nov 1994

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@article{5b03bc67da3c45ebae5169ffc5423a56,

title = "Self-lubricating, TiN-MoS2 composite coatings produced by simultaneous deposition from Ti((CH3)2N)4/NH3/MoF6/H2S gas mixtures",

abstract = "Composite coatings consisting of discrete phases of TiN and MoS2 were codeposited on graphite substrates from Ti((CH3)2N)4/NH3/MoF6/H2S gas mixtures in a cold-wall reactor at 1073 K and 1.3 kPa. Chemical composition and microstructure of the coatings were characterized by Auger electron spectroscopy, X-ray diffraction, and transmission electron microscopy. Kinetic friction coefficients of the coatings were determined by a computer-controlled friction microprobe and values less than 0.2 were obtained with a type-440C stainless-steel counterface under ambient condition.",

author = "Bae, \{Y. W.\} and Lee, \{W. Y.\} and Besmann, \{T. M.\} and Blau, \{P. J.\} and More, \{K. L.\} and Braski, \{D. N.\}",

year = "1995",

language = "English",

volume = "363",

pages = "231--236",

note = "Proceedings of the 1994 MRS Fall Meeting ; Conference date: 28-11-1994 Through 30-11-1994",

}

TY - JOUR

T1 - Self-lubricating, TiN-MoS2 composite coatings produced by simultaneous deposition from Ti((CH3)2N)4/NH3/MoF6/H2S gas mixtures

AU - Bae, Y. W.

AU - Lee, W. Y.

AU - Besmann, T. M.

AU - Blau, P. J.

AU - More, K. L.

AU - Braski, D. N.

PY - 1995

Y1 - 1995

N2 - Composite coatings consisting of discrete phases of TiN and MoS2 were codeposited on graphite substrates from Ti((CH3)2N)4/NH3/MoF6/H2S gas mixtures in a cold-wall reactor at 1073 K and 1.3 kPa. Chemical composition and microstructure of the coatings were characterized by Auger electron spectroscopy, X-ray diffraction, and transmission electron microscopy. Kinetic friction coefficients of the coatings were determined by a computer-controlled friction microprobe and values less than 0.2 were obtained with a type-440C stainless-steel counterface under ambient condition.

AB - Composite coatings consisting of discrete phases of TiN and MoS2 were codeposited on graphite substrates from Ti((CH3)2N)4/NH3/MoF6/H2S gas mixtures in a cold-wall reactor at 1073 K and 1.3 kPa. Chemical composition and microstructure of the coatings were characterized by Auger electron spectroscopy, X-ray diffraction, and transmission electron microscopy. Kinetic friction coefficients of the coatings were determined by a computer-controlled friction microprobe and values less than 0.2 were obtained with a type-440C stainless-steel counterface under ambient condition.

UR - https://www.scopus.com/pages/publications/0029225841

UR - https://www.scopus.com/pages/publications/0029225841#tab=citedBy

M3 - Conference article

AN - SCOPUS:0029225841

SN - 0272-9172

VL - 363

SP - 231

EP - 236

JO - Materials Research Society Symposium Proceedings

JF - Materials Research Society Symposium Proceedings

T2 - Proceedings of the 1994 MRS Fall Meeting

Y2 - 28 November 1994 through 30 November 1994

ER -

Self-lubricating, TiN-MoS₂ composite coatings produced by simultaneous deposition from Ti((CH₃)₂N)₄/NH₃/MoF₆/H₂S gas mixtures

Abstract

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