Sensitive absorption spectroscopy using tunable semiconductor lasers

Edward A. Whittaker, Khosrow Namjou-Khaless, Simin Cai

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations

Abstract

As performance levels for sophisticated electronic materials and device processing increase so to does the demand for versatile methods for on-line real time sensing of many process parameters. To that end we have developed a series of tunable semiconductor laser spectrometers for use in detection schemes of gas phase chemical species via infrared absorption spectroscopy. We report here on characterization of dual modulation schemes for enhanced sensitivity, interference fringe free, absorption spectroscopy data.

Original languageEnglish
Pages (from-to)129-137
Number of pages9
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3000
DOIs
StatePublished - 1997
EventLaser Diode and LED Applications III - San Jose, CA, United States
Duration: 10 Feb 199710 Feb 1997

Keywords

  • Interference fringe rejection
  • Laser spectroscopy
  • Modulation spectroscopy
  • Semiconductor lasers
  • Sensitive chemical detection
  • Tunable lasers

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