Abstract
As performance levels for sophisticated electronic materials and device processing increase so to does the demand for versatile methods for on-line real time sensing of many process parameters. To that end we have developed a series of tunable semiconductor laser spectrometers for use in detection schemes of gas phase chemical species via infrared absorption spectroscopy. We report here on characterization of dual modulation schemes for enhanced sensitivity, interference fringe free, absorption spectroscopy data.
Original language | English |
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Pages (from-to) | 129-137 |
Number of pages | 9 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 3000 |
DOIs | |
State | Published - 1997 |
Event | Laser Diode and LED Applications III - San Jose, CA, United States Duration: 10 Feb 1997 → 10 Feb 1997 |
Keywords
- Interference fringe rejection
- Laser spectroscopy
- Modulation spectroscopy
- Semiconductor lasers
- Sensitive chemical detection
- Tunable lasers