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Shape memory alloy bimorph microactuators by lift-off process
Hao Sun
, Jianjun Luo
, Zhongjing Ren
, Ming Lu
, Dmytro Nykypanchuk
, Sundeep Mangla
,
Yong Shi
Department of Mechanical Engineering
Northwestern Polytechnical University Xian
Stevens Institute of Technology
Brookhaven National Laboratory
SUNY Downstate Health Sciences University
Research output
:
Contribution to journal
›
Article
›
peer-review
20
Scopus citations
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Physics
Thin Films
100%
Shape Memory Alloy
100%
Behavior
50%
Simulation
25%
Cooling
25%
Fabrication
25%
Heating
25%
Images
25%
Crystallization
25%
Etching
25%
Annealing
25%
Scanning Electron Microscopy
25%
Evaporation
25%
Material Science
Thin Films
100%
Shape Memory Effect
100%
Actuator
50%
Finite Element Method
25%
Scanning Electron Microscopy
25%
Crystallization
25%
Annealing
25%
X-Ray Diffraction
25%