TY - JOUR
T1 - Shape memory alloys for micromembrane actuation
AU - Surbled, Patrick
AU - Le Pioufle, Bruno
AU - Yang, E. H.
AU - Fujita, Hiroyuki
N1 - Publisher Copyright:
© SPIE 1999.
PY - 1999
Y1 - 1999
N2 - More and more technologies and new materials have been combined with silicon process technologies to enhance the performances of microsystems and extend the application fields. Among these technologies, the Shape Memory Alloys (SMA's) as thin films have been developed recently. They have been shown to induce high displacement and large force/mass ratio under low voltage. They can produce work output higher than can be provided with other kinds of actuators. However, such SMA actuators are not easy to make because specific annealing treatments or mechanical bias springs are needed to realize cyclic device operation. Moreover, adhesion problems of SMA thin films may occur during the annealing treatment. We have developed a simple fabrication process allowing a reliable operation principle of a micromembrane. The cyclic actuation is ensured by membrane thickness residual stresses that avoids the assembling steps. These membranes whose surface varies from 200 × 200 μ2 up to 2 × 2 mm2 have been successfully tested. As developed, they are very adapted to integration process of microelectronics and can be applied to many applications such as optical, fluidic devices, and especially for biomedical applications as SMA's are biocompatible.
AB - More and more technologies and new materials have been combined with silicon process technologies to enhance the performances of microsystems and extend the application fields. Among these technologies, the Shape Memory Alloys (SMA's) as thin films have been developed recently. They have been shown to induce high displacement and large force/mass ratio under low voltage. They can produce work output higher than can be provided with other kinds of actuators. However, such SMA actuators are not easy to make because specific annealing treatments or mechanical bias springs are needed to realize cyclic device operation. Moreover, adhesion problems of SMA thin films may occur during the annealing treatment. We have developed a simple fabrication process allowing a reliable operation principle of a micromembrane. The cyclic actuation is ensured by membrane thickness residual stresses that avoids the assembling steps. These membranes whose surface varies from 200 × 200 μ2 up to 2 × 2 mm2 have been successfully tested. As developed, they are very adapted to integration process of microelectronics and can be applied to many applications such as optical, fluidic devices, and especially for biomedical applications as SMA's are biocompatible.
KW - Microactuator
KW - Micromachining
KW - Micromembrane
KW - Microsystems
KW - Shape Memory Alloy
UR - http://www.scopus.com/inward/record.url?scp=0038260892&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0038260892&partnerID=8YFLogxK
U2 - 10.1117/12.364304
DO - 10.1117/12.364304
M3 - Conference article
AN - SCOPUS:0038260892
SN - 0277-786X
VL - 3825
SP - 63
EP - 70
JO - Proceedings of SPIE - The International Society for Optical Engineering
JF - Proceedings of SPIE - The International Society for Optical Engineering
T2 - Microsystems Metrology and Inspection
Y2 - 14 June 1999
ER -