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Shape memory alloys for micromembrane actuation
Patrick Surbled
, Bruno Le Pioufle
,
E. H. Yang
, Hiroyuki Fujita
Department of Mechanical Engineering
The University of Tokyo
Research output
:
Contribution to journal
›
Conference article
›
peer-review
1
Scopus citations
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Engineering
Actuation
100%
Actuators
40%
Annealing
20%
Applications
20%
Biomedical Application
20%
Fabrication
20%
Low Voltage
20%
Mass Ratio
20%
Membrane
40%
Newer Material
20%
Performance
20%
Process Technology
20%
Surfaces
20%
Thickness
20%
Thin Films
40%
Material Science
Actuator
40%
Adhesion
20%
Annealing
20%
Devices
40%
Fluidics
20%
Material
20%
Membrane
40%
Microelectronics
20%
Residual Stress
20%
Silicon
20%
Surface
20%
Thin Films
40%