@inproceedings{1215078dfc424e8d8e033250e3ea6bb4,
title = "Silicon Processing Chemical Diagnostics and Control Using Diode Lasers",
author = "Whittaker, {Edward A.} and Sun, {H. C.} and Ng, {C. K.} and B. Singh and V. Patel",
year = "1994",
language = "English",
series = "Optics InfoBase Conference Papers",
pages = "47--50",
booktitle = "Laser Applications to Chemical Analysis, LACSEA 1994",
note = "Laser Applications to Chemical Analysis, LACSEA 1994 ; Conference date: 08-03-1994 Through 11-03-1994",
}