Silicon Processing Chemical Diagnostics and Control Using Diode Lasers

Edward A. Whittaker, H. C. Sun, C. K. Ng, B. Singh, V. Patel

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Original languageEnglish
Title of host publicationLaser Applications to Chemical Analysis, LACSEA 1994
Pages47-50
Number of pages4
ISBN (Electronic)1557523339, 9781557523334
StatePublished - 1994
EventLaser Applications to Chemical Analysis, LACSEA 1994 - Jackson Hole, United States
Duration: 8 Mar 199411 Mar 1994

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Conference

ConferenceLaser Applications to Chemical Analysis, LACSEA 1994
Country/TerritoryUnited States
CityJackson Hole
Period8/03/9411/03/94

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