Silicon Processing Chemical Diagnostics and Control Using Diode Lasers

Edward A. Whittaker, H. C. Sun, C. K. Ng, B. Singh, V. Patel

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Original language	English
Title of host publication	Laser Applications to Chemical Analysis, LACSEA 1994
Pages	47-50
Number of pages	4
ISBN (Electronic)	1557523339, 9781557523334
State	Published - 1994
Event	Laser Applications to Chemical Analysis, LACSEA 1994 - Jackson Hole, United States Duration: 8 Mar 1994 → 11 Mar 1994

Name	Optics InfoBase Conference Papers
ISSN (Electronic)	2162-2701

Conference	Laser Applications to Chemical Analysis, LACSEA 1994
Country/Territory	United States
City	Jackson Hole
Period	8/03/94 → 11/03/94

Cite this

@inproceedings{1215078dfc424e8d8e033250e3ea6bb4,

title = "Silicon Processing Chemical Diagnostics and Control Using Diode Lasers",

author = "Whittaker, \{Edward A.\} and Sun, \{H. C.\} and Ng, \{C. K.\} and B. Singh and V. Patel",

year = "1994",

language = "English",

series = "Optics InfoBase Conference Papers",

pages = "47--50",

booktitle = "Laser Applications to Chemical Analysis, LACSEA 1994",

note = "Laser Applications to Chemical Analysis, LACSEA 1994 ; Conference date: 08-03-1994 Through 11-03-1994",

}

TY - GEN

T1 - Silicon Processing Chemical Diagnostics and Control Using Diode Lasers

AU - Whittaker, Edward A.

AU - Sun, H. C.

AU - Ng, C. K.

AU - Singh, B.

AU - Patel, V.

PY - 1994

Y1 - 1994

UR - https://www.scopus.com/pages/publications/85135631784

UR - https://www.scopus.com/inward/citedby.url?scp=85135631784&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:85135631784

T3 - Optics InfoBase Conference Papers

SP - 47

EP - 50

BT - Laser Applications to Chemical Analysis, LACSEA 1994

T2 - Laser Applications to Chemical Analysis, LACSEA 1994

Y2 - 8 March 1994 through 11 March 1994

ER -