Synthesis and selected micro-mechanical properties of titanium nitride thin films by the pyrolysis of tetrakis titanium in ammonia

Y. W. Bae, W. Y. Lee, T. M. Besmann, P. J. Blau, L. Riester

Research output: Contribution to journalConference articlepeer-review

Abstract

Thin films of titanium nitride were chemical vapor deposited on (100)-oriented single-crystal silicon substrates from tetrakis (dimethylamino) titanium, Ti((CH3)2N)4, and ammonia gas mixtures in a cold-wall reactor at 623 K and 655 Pa. The films were characterized by Auger electron spectroscopy, X-ray diffraction, and transmission electron spectroscopy. The nano-scale hardness of the film, measured by nanoindentation, was 12.7±0.6 GPa. The average kinetic friction coefficient against unlubricated, type-440C stainless steel was determined using a computer-controlled friction microprobe to be approx.0.43.

Original languageEnglish
Pages (from-to)245-250
Number of pages6
JournalMaterials Research Society Symposium Proceedings
Volume363
StatePublished - 1995
EventProceedings of the 1994 MRS Fall Meeting - Boston, MA, USA
Duration: 28 Nov 199430 Nov 1994

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