TY - JOUR
T1 - Synthesis and selected micro-mechanical properties of titanium nitride thin films by the pyrolysis of tetrakis titanium in ammonia
AU - Bae, Y. W.
AU - Lee, W. Y.
AU - Besmann, T. M.
AU - Blau, P. J.
AU - Riester, L.
PY - 1995
Y1 - 1995
N2 - Thin films of titanium nitride were chemical vapor deposited on (100)-oriented single-crystal silicon substrates from tetrakis (dimethylamino) titanium, Ti((CH3)2N)4, and ammonia gas mixtures in a cold-wall reactor at 623 K and 655 Pa. The films were characterized by Auger electron spectroscopy, X-ray diffraction, and transmission electron spectroscopy. The nano-scale hardness of the film, measured by nanoindentation, was 12.7±0.6 GPa. The average kinetic friction coefficient against unlubricated, type-440C stainless steel was determined using a computer-controlled friction microprobe to be approx.0.43.
AB - Thin films of titanium nitride were chemical vapor deposited on (100)-oriented single-crystal silicon substrates from tetrakis (dimethylamino) titanium, Ti((CH3)2N)4, and ammonia gas mixtures in a cold-wall reactor at 623 K and 655 Pa. The films were characterized by Auger electron spectroscopy, X-ray diffraction, and transmission electron spectroscopy. The nano-scale hardness of the film, measured by nanoindentation, was 12.7±0.6 GPa. The average kinetic friction coefficient against unlubricated, type-440C stainless steel was determined using a computer-controlled friction microprobe to be approx.0.43.
UR - https://www.scopus.com/pages/publications/0029238999
UR - https://www.scopus.com/pages/publications/0029238999#tab=citedBy
M3 - Conference article
AN - SCOPUS:0029238999
SN - 0272-9172
VL - 363
SP - 245
EP - 250
JO - Materials Research Society Symposium Proceedings
JF - Materials Research Society Symposium Proceedings
T2 - Proceedings of the 1994 MRS Fall Meeting
Y2 - 28 November 1994 through 30 November 1994
ER -