Synthesis and selected micro-mechanical properties of titanium nitride thin films by the pyrolysis of tetrakis titanium in ammonia

Y. W. Bae; W. Y. Lee; T. M. Besmann; P. J. Blau; L. Riester

Synthesis and selected micro-mechanical properties of titanium nitride thin films by the pyrolysis of tetrakis titanium in ammonia

Y. W. Bae
, W. Y. Lee
, T. M. Besmann
, P. J. Blau
, L. Riester

Oak Ridge National Laboratory

Research output: Contribution to journal › Conference article › peer-review

Abstract

Thin films of titanium nitride were chemical vapor deposited on (100)-oriented single-crystal silicon substrates from tetrakis (dimethylamino) titanium, Ti((CH₃)₂N)₄, and ammonia gas mixtures in a cold-wall reactor at 623 K and 655 Pa. The films were characterized by Auger electron spectroscopy, X-ray diffraction, and transmission electron spectroscopy. The nano-scale hardness of the film, measured by nanoindentation, was 12.7±0.6 GPa. The average kinetic friction coefficient against unlubricated, type-440C stainless steel was determined using a computer-controlled friction microprobe to be approx.0.43.

Original language	English
Pages (from-to)	245-250
Number of pages	6
Journal	Materials Research Society Symposium Proceedings
Volume	363
State	Published - 1995
Event	Proceedings of the 1994 MRS Fall Meeting - Boston, MA, USA Duration: 28 Nov 1994 → 30 Nov 1994

Cite this

@article{60e143f42df1490cada4452bd58e0c79,

title = "Synthesis and selected micro-mechanical properties of titanium nitride thin films by the pyrolysis of tetrakis titanium in ammonia",

abstract = "Thin films of titanium nitride were chemical vapor deposited on (100)-oriented single-crystal silicon substrates from tetrakis (dimethylamino) titanium, Ti((CH3)2N)4, and ammonia gas mixtures in a cold-wall reactor at 623 K and 655 Pa. The films were characterized by Auger electron spectroscopy, X-ray diffraction, and transmission electron spectroscopy. The nano-scale hardness of the film, measured by nanoindentation, was 12.7±0.6 GPa. The average kinetic friction coefficient against unlubricated, type-440C stainless steel was determined using a computer-controlled friction microprobe to be approx.0.43.",

author = "Bae, \{Y. W.\} and Lee, \{W. Y.\} and Besmann, \{T. M.\} and Blau, \{P. J.\} and L. Riester",

year = "1995",

language = "English",

volume = "363",

pages = "245--250",

note = "Proceedings of the 1994 MRS Fall Meeting ; Conference date: 28-11-1994 Through 30-11-1994",

}

TY - JOUR

T1 - Synthesis and selected micro-mechanical properties of titanium nitride thin films by the pyrolysis of tetrakis titanium in ammonia

AU - Bae, Y. W.

AU - Lee, W. Y.

AU - Besmann, T. M.

AU - Blau, P. J.

AU - Riester, L.

PY - 1995

Y1 - 1995

N2 - Thin films of titanium nitride were chemical vapor deposited on (100)-oriented single-crystal silicon substrates from tetrakis (dimethylamino) titanium, Ti((CH3)2N)4, and ammonia gas mixtures in a cold-wall reactor at 623 K and 655 Pa. The films were characterized by Auger electron spectroscopy, X-ray diffraction, and transmission electron spectroscopy. The nano-scale hardness of the film, measured by nanoindentation, was 12.7±0.6 GPa. The average kinetic friction coefficient against unlubricated, type-440C stainless steel was determined using a computer-controlled friction microprobe to be approx.0.43.

AB - Thin films of titanium nitride were chemical vapor deposited on (100)-oriented single-crystal silicon substrates from tetrakis (dimethylamino) titanium, Ti((CH3)2N)4, and ammonia gas mixtures in a cold-wall reactor at 623 K and 655 Pa. The films were characterized by Auger electron spectroscopy, X-ray diffraction, and transmission electron spectroscopy. The nano-scale hardness of the film, measured by nanoindentation, was 12.7±0.6 GPa. The average kinetic friction coefficient against unlubricated, type-440C stainless steel was determined using a computer-controlled friction microprobe to be approx.0.43.

UR - https://www.scopus.com/pages/publications/0029238999

UR - https://www.scopus.com/pages/publications/0029238999#tab=citedBy

M3 - Conference article

AN - SCOPUS:0029238999

SN - 0272-9172

VL - 363

SP - 245

EP - 250

JO - Materials Research Society Symposium Proceedings

JF - Materials Research Society Symposium Proceedings

T2 - Proceedings of the 1994 MRS Fall Meeting

Y2 - 28 November 1994 through 30 November 1994

ER -

Synthesis and selected micro-mechanical properties of titanium nitride thin films by the pyrolysis of tetrakis titanium in ammonia

Abstract

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