TY - GEN
T1 - System hierarchy optimization method for MEMS applications
AU - Liu, Nan
AU - Manoochehri, Souran
PY - 2005
Y1 - 2005
N2 - A new design optimization methodology for Micro-Electro-Mechanical Systems (MEMS) application is presented. The optimization approach considers minimization of several uncertainty factors on the overall system performance while satisfying target requirements specified in the form of constraints on micro-fabrication processes and materials system. The design process is modeled as a multi-level hierarchical optimal design problem. The design problem is decomposed into two analysis systems; uncertainty effects analysis and performance sensitivity analysis. Each analysis system can be partitioned into several subsystems according to the different functions they perform. The entire problem has been treated as a multi-disciplinary design optimization (MDO) for maximum robustness and performance achievement. In this study, the analysis results are provided as optimized device geometry parameters for the example of the selected micro accelerometer device.
AB - A new design optimization methodology for Micro-Electro-Mechanical Systems (MEMS) application is presented. The optimization approach considers minimization of several uncertainty factors on the overall system performance while satisfying target requirements specified in the form of constraints on micro-fabrication processes and materials system. The design process is modeled as a multi-level hierarchical optimal design problem. The design problem is decomposed into two analysis systems; uncertainty effects analysis and performance sensitivity analysis. Each analysis system can be partitioned into several subsystems according to the different functions they perform. The entire problem has been treated as a multi-disciplinary design optimization (MDO) for maximum robustness and performance achievement. In this study, the analysis results are provided as optimized device geometry parameters for the example of the selected micro accelerometer device.
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U2 - 10.1115/IMECE2005-81653
DO - 10.1115/IMECE2005-81653
M3 - Conference contribution
AN - SCOPUS:33646016581
SN - 079184224X
SN - 9780791842249
T3 - American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
SP - 497
EP - 505
BT - American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
T2 - 2005 ASME International Mecahnical Engineering Congress and Exposition, IMECE 2005
Y2 - 5 November 2005 through 11 November 2005
ER -