System hierarchy optimization method for MEMS applications

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1 Scopus citations

Abstract

A new design optimization methodology for Micro-Electro-Mechanical Systems (MEMS) application is presented. The optimization approach considers minimization of several uncertainty factors on the overall system performance while satisfying target requirements specified in the form of constraints on micro-fabrication processes and materials system. The design process is modeled as a multi-level hierarchical optimal design problem. The design problem is decomposed into two analysis systems; uncertainty effects analysis and performance sensitivity analysis. Each analysis system can be partitioned into several subsystems according to the different functions they perform. The entire problem has been treated as a multi-disciplinary design optimization (MDO) for maximum robustness and performance achievement. In this study, the analysis results are provided as optimized device geometry parameters for the example of the selected micro accelerometer device.

Original languageEnglish
Title of host publicationAmerican Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
Pages497-505
Number of pages9
DOIs
StatePublished - 2005
Event2005 ASME International Mecahnical Engineering Congress and Exposition, IMECE 2005 - Orlando, FL, United States
Duration: 5 Nov 200511 Nov 2005

Publication series

NameAmerican Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
Volume7 MEMS
ISSN (Print)1096-665X

Conference

Conference2005 ASME International Mecahnical Engineering Congress and Exposition, IMECE 2005
Country/TerritoryUnited States
CityOrlando, FL
Period5/11/0511/11/05

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