TY - GEN
T1 - The effect of thermal annealing processes on graphene
AU - Kumar, K.
AU - Kim, Y. S.
AU - Tian, Y.
AU - Li, X.
AU - Pallikaras, A.
AU - Yang, E. H.
PY - 2013
Y1 - 2013
N2 - We present an in-depth investigation of the consequence of gas and vacuum annealing utilized to remove polymer (PMMA) residues on the electronic doping, strain, and morphology of chemical vapor deposition grown graphene. We demonstrate that annealing under gas or vacuum increases doping levels in graphene as residual PMMA is burned off, interfacial water is evaporated, and graphene conformally contacts the substrate. This is corroborated by AFM measurements, indicating a need for further research on graphene transfer or growth methods where substrate-induced doping is minimized. These results are significant for determining the extent of PMMA influence on graphene during the transfer process and/or device fabrication.
AB - We present an in-depth investigation of the consequence of gas and vacuum annealing utilized to remove polymer (PMMA) residues on the electronic doping, strain, and morphology of chemical vapor deposition grown graphene. We demonstrate that annealing under gas or vacuum increases doping levels in graphene as residual PMMA is burned off, interfacial water is evaporated, and graphene conformally contacts the substrate. This is corroborated by AFM measurements, indicating a need for further research on graphene transfer or growth methods where substrate-induced doping is minimized. These results are significant for determining the extent of PMMA influence on graphene during the transfer process and/or device fabrication.
KW - Annealing
KW - Atomic force microscopy
KW - Chemical vapor deposition
KW - Graphene
KW - Raman spectroscopy
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M3 - Conference contribution
AN - SCOPUS:84881111381
SN - 9781482205817
T3 - Technical Proceedings of the 2013 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2013
SP - 245
EP - 248
BT - Technical Proceedings of the 2013 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2013
T2 - Nanotechnology 2013: Advanced Materials, CNTs, Particles, Films and Composites - 2013 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2013
Y2 - 12 May 2013 through 16 May 2013
ER -