TY - JOUR
T1 - Thin-film piezoelectric unimorph actuator-based deformable mirror with a transferred silicon membrane
AU - Yang, Eui Hyeok
AU - Hishinuma, Yoshikazu
AU - Cheng, Jian Gong
AU - Trolier-Mckinstry, Susan
AU - Bloemhof, Eric
AU - Levine, B. Martin
PY - 2006/10
Y1 - 2006/10
N2 - This paper describes a proof-of-concept deformable mirror (DM) technology, with a continuous single-crystal silicon membrane reflecting surface, based on PbZr0.52Ti0.48O3 (PZT) unimorph membrane microactuators. A potential application for a terrestrial planet finder adaptive nuller is also discussed. The DM comprises a continuous, large-aperture, silicon membrane "transferred" onto a 20 × 20 piezoelectric unimorph actuator array. The actuator array was prepared on an electroded silicon substrate using chemical-solution-deposited 2-μm-thick PZT films working in a d31 mode. The substrate was subsequently bulk-micromachined to create membrane structures with residual silicon acting as the passive layer in the actuator structure. A mathematical model simulated the membrane microactuator performance and aided in the optimization of membrane thicknesses and electrode geometries. Excellent agreement was obtained between the model and the experimental results. The resulting piezoelectric unimorph actuators with patterned PZT films produced large strokes at low voltages. A PZT unimorph actuator, 2.5 mm in diameter with optimized PZT/silicon thickness and design showed a deflection of 5.7 μm at 20 V. A DM structure with a 20-μm-thick silicon membrane mirror (50 mm × 50 mm area) supported by 400 PZT unimorph actuators was successfully fabricated and optically characterized. The measured maximum mirror deflection at 30 V was approximately 1 μm. An assembled DM showed an operating frequency bandwidth of 30 kHz and an influence function of approximately 30%.
AB - This paper describes a proof-of-concept deformable mirror (DM) technology, with a continuous single-crystal silicon membrane reflecting surface, based on PbZr0.52Ti0.48O3 (PZT) unimorph membrane microactuators. A potential application for a terrestrial planet finder adaptive nuller is also discussed. The DM comprises a continuous, large-aperture, silicon membrane "transferred" onto a 20 × 20 piezoelectric unimorph actuator array. The actuator array was prepared on an electroded silicon substrate using chemical-solution-deposited 2-μm-thick PZT films working in a d31 mode. The substrate was subsequently bulk-micromachined to create membrane structures with residual silicon acting as the passive layer in the actuator structure. A mathematical model simulated the membrane microactuator performance and aided in the optimization of membrane thicknesses and electrode geometries. Excellent agreement was obtained between the model and the experimental results. The resulting piezoelectric unimorph actuators with patterned PZT films produced large strokes at low voltages. A PZT unimorph actuator, 2.5 mm in diameter with optimized PZT/silicon thickness and design showed a deflection of 5.7 μm at 20 V. A DM structure with a 20-μm-thick silicon membrane mirror (50 mm × 50 mm area) supported by 400 PZT unimorph actuators was successfully fabricated and optically characterized. The measured maximum mirror deflection at 30 V was approximately 1 μm. An assembled DM showed an operating frequency bandwidth of 30 kHz and an influence function of approximately 30%.
KW - Deformable mirror
KW - Large-area mirror
KW - PZT thinfilm
KW - Unimorph actuator
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U2 - 10.1109/JMEMS.2006.880208
DO - 10.1109/JMEMS.2006.880208
M3 - Article
AN - SCOPUS:33747428149
SN - 1057-7157
VL - 15
SP - 1214
EP - 1225
JO - Journal of Microelectromechanical Systems
JF - Journal of Microelectromechanical Systems
IS - 5
ER -