Towards MEMS tester for measuring metal nanofilm's Lorenz number

Weihe Xu, Qi Chen, Yong Shi

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The Lorenz number of metals has been considered constant according to the Wiedemann-Franz law. But this has been questioned by the most recent research in nano-scale thermal transfer. To study the size effect of Lorenz number for thin film metals, a MEMS tester was designed and fabricated. The tester is capable of measuring the Lorenz number of thin films or nanowires with various dimensions. The ANSYS simulation showed the measurement error generated by the non-uniformity in the heating area is below 2%.

Original languageEnglish
Title of host publicationASME 2011 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2011
Pages397-399
Number of pages3
DOIs
StatePublished - 2011
EventASME 2011 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2011 - Washington, DC, United States
Duration: 28 Aug 201131 Aug 2011

Publication series

NameProceedings of the ASME Design Engineering Technical Conference
Volume7

Conference

ConferenceASME 2011 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2011
Country/TerritoryUnited States
CityWashington, DC
Period28/08/1131/08/11

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