TY - JOUR
T1 - Tunability of indium tin oxide materials for mid-infrared plasmonics applications
AU - Wang, Yu
AU - Overvig, Adam C.
AU - Shrestha, Sajan
AU - Zhang, Ran
AU - Wang, Ren
AU - Yu, Nanfang
AU - Negro, Luca Dal
N1 - Publisher Copyright:
© 2017 Optical Society of America.
PY - 2017
Y1 - 2017
N2 - Transparent conductive oxides (TCOs) have emerged as alternative plasmonic materials in recent years to replace noble metals. The advantages of TCOs include CMOS compatibility, tunability of optical and structural properties, and reduced losses. In this work, we demonstrate how post-deposition annealing of indium tin oxide (ITO) films in oxygen atmosphere allows for tuning their optical dispersion properties to the mid-infrared spectral range while simultaneously reducing their absorption losses. In particular, we show a materials strategy that extends the epsilon-near-zero (ENZ) point of ITO from the nearinfrared to the mid-infrared range. This is demonstrated by fabricating periodic arrays of ITO discs of varying diameters and characterizing their plasmonic resonances in the mid-infrared range from λ = 5 to 10 μm. The developed ITO plasmonic structures pave the way to the development of novel infrared active devices for sensing and spectroscopy on a siliconcompatible platform.
AB - Transparent conductive oxides (TCOs) have emerged as alternative plasmonic materials in recent years to replace noble metals. The advantages of TCOs include CMOS compatibility, tunability of optical and structural properties, and reduced losses. In this work, we demonstrate how post-deposition annealing of indium tin oxide (ITO) films in oxygen atmosphere allows for tuning their optical dispersion properties to the mid-infrared spectral range while simultaneously reducing their absorption losses. In particular, we show a materials strategy that extends the epsilon-near-zero (ENZ) point of ITO from the nearinfrared to the mid-infrared range. This is demonstrated by fabricating periodic arrays of ITO discs of varying diameters and characterizing their plasmonic resonances in the mid-infrared range from λ = 5 to 10 μm. The developed ITO plasmonic structures pave the way to the development of novel infrared active devices for sensing and spectroscopy on a siliconcompatible platform.
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U2 - 10.1364/OME.7.002727
DO - 10.1364/OME.7.002727
M3 - Article
AN - SCOPUS:85022326415
VL - 7
SP - 2727
EP - 2739
JO - Optical Materials Express
JF - Optical Materials Express
IS - 8
ER -