TY - JOUR
T1 - Wafer-scale pattern transfer of metal nanostructures on polydimethylsiloxane (PDMS) substrates via holographic nanopatterns
AU - Du, Ke
AU - Wathuthanthri, Ishan
AU - Liu, Yuyang
AU - Xu, Wei
AU - Choi, Chang Hwan
PY - 2012/10/24
Y1 - 2012/10/24
N2 - In this paper, we report on a cost-effective and simple, nondestructive pattern transfer method that allows the fabrication of metallic nanostructures on a polydimethylsiloxane (PDMS) substrate on a wafer scale. The key idea is to use holographic nanopatterns of a photoresist (PR) layer as template structures, where a metal film is directly deposited in order to replicate the nanopatterns of the PR template layer. Then, the PDMS elastomer is molded onto the metal film and the metal/PDMS composite layer is directly peeled off from the PR surface. Many metallic materials including Ti, Al, and Ag were successfully nanopatterned on PDMS substrates by the pattern transfer process with no use of any adhesion promoter layer or coating. In case of Au that has poor adhesion to PDMS material, a salinization of the metal surface with 3-(aminopropyl)- triethoxysilane (APTES) monolayer promoted the adhesion and led to successful pattern transfer. A series of adhesion tests confirmed the good adhesion of the transferred metal films onto the molded PDMS substrates, including scotch-tape and wet immersion tests. The inexpensive and robust pattern transfer approach of metallic nanostructures onto transparent and flexible PDMS substrates will open the new door for many scientific and engineering applications such as micro-/nanofluidics, optofluidics, nanophotonics, and nanoelectronics.
AB - In this paper, we report on a cost-effective and simple, nondestructive pattern transfer method that allows the fabrication of metallic nanostructures on a polydimethylsiloxane (PDMS) substrate on a wafer scale. The key idea is to use holographic nanopatterns of a photoresist (PR) layer as template structures, where a metal film is directly deposited in order to replicate the nanopatterns of the PR template layer. Then, the PDMS elastomer is molded onto the metal film and the metal/PDMS composite layer is directly peeled off from the PR surface. Many metallic materials including Ti, Al, and Ag were successfully nanopatterned on PDMS substrates by the pattern transfer process with no use of any adhesion promoter layer or coating. In case of Au that has poor adhesion to PDMS material, a salinization of the metal surface with 3-(aminopropyl)- triethoxysilane (APTES) monolayer promoted the adhesion and led to successful pattern transfer. A series of adhesion tests confirmed the good adhesion of the transferred metal films onto the molded PDMS substrates, including scotch-tape and wet immersion tests. The inexpensive and robust pattern transfer approach of metallic nanostructures onto transparent and flexible PDMS substrates will open the new door for many scientific and engineering applications such as micro-/nanofluidics, optofluidics, nanophotonics, and nanoelectronics.
KW - PDMS
KW - adhesion
KW - holographic nanopatterns
KW - metal
KW - nanostructures
KW - pattern transfer
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U2 - 10.1021/am301423s
DO - 10.1021/am301423s
M3 - Article
AN - SCOPUS:84867805521
SN - 1944-8244
VL - 4
SP - 5505
EP - 5514
JO - ACS Applied Materials and Interfaces
JF - ACS Applied Materials and Interfaces
IS - 10
ER -