TY - GEN
T1 - Zero-power latching, large-stroke, high-precision linear microactuator for lightweight structures in space
AU - Toda, Risaku
AU - Yang, Eui Hyeok
PY - 2006
Y1 - 2006
N2 - This paper presents the successful demonstration of a latching-type, large-stroke, high-precision linear microactuator. The microactuator is capable of zero-power latching, or forcibly maintaining its position by using pre-stressed spring load. The actuator is driven by a combination of PZT actuator for slider thrust and electrostatic comb drive for slider grip. Incremental step size is precisely adjustable to tens of nanometer level by controlling PZT actuator voltage. Large stroke is obtained by repeating the operation sequence numerous times. Large stroke exceeding 600 μm has been demonstrated. There is no conceivable limit to the stroke except for the length of the slider and external load.
AB - This paper presents the successful demonstration of a latching-type, large-stroke, high-precision linear microactuator. The microactuator is capable of zero-power latching, or forcibly maintaining its position by using pre-stressed spring load. The actuator is driven by a combination of PZT actuator for slider thrust and electrostatic comb drive for slider grip. Incremental step size is precisely adjustable to tens of nanometer level by controlling PZT actuator voltage. Large stroke is obtained by repeating the operation sequence numerous times. Large stroke exceeding 600 μm has been demonstrated. There is no conceivable limit to the stroke except for the length of the slider and external load.
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M3 - Conference contribution
AN - SCOPUS:33750125250
SN - 0780394755
SN - 9780780394759
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 726
EP - 729
BT - 19th IEEE International Conference on Micro Electro Mechanical Systems
T2 - 19th IEEE International Conference on Micro Electro Mechanical Systems
Y2 - 22 January 2006 through 26 January 2006
ER -