Zero-power latching, large-stroke, high-precision linear microactuator for lightweight structures in space

Risaku Toda, Eui Hyeok Yang

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

6 Scopus citations

Abstract

This paper presents the successful demonstration of a latching-type, large-stroke, high-precision linear microactuator. The microactuator is capable of zero-power latching, or forcibly maintaining its position by using pre-stressed spring load. The actuator is driven by a combination of PZT actuator for slider thrust and electrostatic comb drive for slider grip. Incremental step size is precisely adjustable to tens of nanometer level by controlling PZT actuator voltage. Large stroke is obtained by repeating the operation sequence numerous times. Large stroke exceeding 600 μm has been demonstrated. There is no conceivable limit to the stroke except for the length of the slider and external load.

Original languageEnglish
Title of host publication19th IEEE International Conference on Micro Electro Mechanical Systems
Pages726-729
Number of pages4
StatePublished - 2006
Event19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey
Duration: 22 Jan 200626 Jan 2006

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2006
ISSN (Print)1084-6999

Conference

Conference19th IEEE International Conference on Micro Electro Mechanical Systems
Country/TerritoryTurkey
CityIstanbul
Period22/01/0626/01/06

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